Thermal-Resistance Effect of Graphene at High Temperatures in Nanoelectromechanical Temperature Sensors

Graphene membranes act as temperature sensors in nanoelectromechanical devices due to their excellent thermal and high-temperature resistance properties. Experimentally, reports on the sensing performance of graphene mainly focus on the temperature interval under 400 K. To explore the sensing perfor...

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Bibliographic Details
Main Authors: Shuai Lei, Ningning Su, Mengwei Li
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/12/2078