Thermal-Resistance Effect of Graphene at High Temperatures in Nanoelectromechanical Temperature Sensors
Graphene membranes act as temperature sensors in nanoelectromechanical devices due to their excellent thermal and high-temperature resistance properties. Experimentally, reports on the sensing performance of graphene mainly focus on the temperature interval under 400 K. To explore the sensing perfor...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-11-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/12/2078 |
| _version_ | 1797456236143181824 |
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| author | Shuai Lei Ningning Su Mengwei Li |
| author_facet | Shuai Lei Ningning Su Mengwei Li |
| author_sort | Shuai Lei |
| collection | DOAJ |
| description | Graphene membranes act as temperature sensors in nanoelectromechanical devices due to their excellent thermal and high-temperature resistance properties. Experimentally, reports on the sensing performance of graphene mainly focus on the temperature interval under 400 K. To explore the sensing performance of graphene temperature sensors at higher temperature intervals, micro-fabricated single-layer graphene on a SiN<sub>X</sub> substrate is presented as temperature sensors by semiconductor technology and its electrical properties were measured. The results show that the temperature coefficient of the resistance value is 2.07 × 10<sup>−3</sup> in the temperature range of 300–450 K and 2.39 × 10<sup>−3</sup> in the temperature range of 450–575 K. From room temperature to high temperature, the “metal” characteristics are presented, and the higher TCR obtained at higher temperature interval is described and analyzed by combining Boltzmann transport equation and thermal expansion theory. These investigations provide further insight into the temperature characteristics of graphene. |
| first_indexed | 2024-03-09T16:05:20Z |
| format | Article |
| id | doaj.art-94e30e40ad0443578428059cbac5fd99 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T16:05:20Z |
| publishDate | 2022-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-94e30e40ad0443578428059cbac5fd992023-11-24T16:43:47ZengMDPI AGMicromachines2072-666X2022-11-011312207810.3390/mi13122078Thermal-Resistance Effect of Graphene at High Temperatures in Nanoelectromechanical Temperature SensorsShuai Lei0Ningning Su1Mengwei Li2Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, ChinaAcademy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, ChinaAcademy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, ChinaGraphene membranes act as temperature sensors in nanoelectromechanical devices due to their excellent thermal and high-temperature resistance properties. Experimentally, reports on the sensing performance of graphene mainly focus on the temperature interval under 400 K. To explore the sensing performance of graphene temperature sensors at higher temperature intervals, micro-fabricated single-layer graphene on a SiN<sub>X</sub> substrate is presented as temperature sensors by semiconductor technology and its electrical properties were measured. The results show that the temperature coefficient of the resistance value is 2.07 × 10<sup>−3</sup> in the temperature range of 300–450 K and 2.39 × 10<sup>−3</sup> in the temperature range of 450–575 K. From room temperature to high temperature, the “metal” characteristics are presented, and the higher TCR obtained at higher temperature interval is described and analyzed by combining Boltzmann transport equation and thermal expansion theory. These investigations provide further insight into the temperature characteristics of graphene.https://www.mdpi.com/2072-666X/13/12/2078graphenetemperature sensortemperature coefficient of resistancesubstrate |
| spellingShingle | Shuai Lei Ningning Su Mengwei Li Thermal-Resistance Effect of Graphene at High Temperatures in Nanoelectromechanical Temperature Sensors Micromachines graphene temperature sensor temperature coefficient of resistance substrate |
| title | Thermal-Resistance Effect of Graphene at High Temperatures in Nanoelectromechanical Temperature Sensors |
| title_full | Thermal-Resistance Effect of Graphene at High Temperatures in Nanoelectromechanical Temperature Sensors |
| title_fullStr | Thermal-Resistance Effect of Graphene at High Temperatures in Nanoelectromechanical Temperature Sensors |
| title_full_unstemmed | Thermal-Resistance Effect of Graphene at High Temperatures in Nanoelectromechanical Temperature Sensors |
| title_short | Thermal-Resistance Effect of Graphene at High Temperatures in Nanoelectromechanical Temperature Sensors |
| title_sort | thermal resistance effect of graphene at high temperatures in nanoelectromechanical temperature sensors |
| topic | graphene temperature sensor temperature coefficient of resistance substrate |
| url | https://www.mdpi.com/2072-666X/13/12/2078 |
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