Multi-Device Piezoelectric Direct Discharge for Large Area Plasma Treatment
The piezoelectric cold plasma generators (PCPG) allow for production of the piezoelectric direct discharge (PDD), which is a kind of cold atmospheric pressure plasma (APP). The subjects of this study are different arrays of PCPGs for large-area treatment of planar substrates. Two limiting factors ar...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-05-01
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Series: | Plasma |
Subjects: | |
Online Access: | https://www.mdpi.com/2571-6182/4/2/19 |