Multi-Device Piezoelectric Direct Discharge for Large Area Plasma Treatment

Multi-Device Piezoelectric Direct Discharge for Large Area Plasma Treatment

The piezoelectric cold plasma generators (PCPG) allow for production of the piezoelectric direct discharge (PDD), which is a kind of cold atmospheric pressure plasma (APP). The subjects of this study are different arrays of PCPGs for large-area treatment of planar substrates. Two limiting factors ar...

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Bibliographic Details
Main Authors: Dariusz Korzec, Florian Hoppenthaler, Anatoly Shestakov, Dominik Burger, Andrej Shapiro, Thomas Andres, Simona Lerach, Stefan Nettesheim
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Plasma
Subjects:
atmospheric plasma
resonant piezoelectric transformer
piezoelectric direct discharge
plasma arrays
surface treatment
Online Access:https://www.mdpi.com/2571-6182/4/2/19

Internet

https://www.mdpi.com/2571-6182/4/2/19

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