Comparative study of post-growth annealing of Cu(hfac)2, Co2(CO)8 and Me2Au(acac) metal precursors deposited by FEBID

Comparative study of post-growth annealing of Cu(hfac)2, Co2(CO)8 and Me2Au(acac) metal precursors deposited by FEBID

Non-noble metals, such as Cu and Co, as well as noble metals, such as Au, can be used in a number modern technological applications, which include advanced scanning-probe systems, magnetic memory and storage, ferroelectric tunnel junction memristors, metal interconnects for high performance integrat...

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Bibliographic Details
Main Authors: Marcos V. Puydinger dos Santos, Aleksandra Szkudlarek, Artur Rydosz, Carlos Guerra-Nuñez, Fanny Béron, Kleber R. Pirota, Stanislav Moshkalev, José Alexandre Diniz, Ivo Utke
Format: Article
Language:English
Published: Beilstein-Institut 2018-01-01
Series:Beilstein Journal of Nanotechnology
Subjects:
copper
gold
cobalt
focused-electron-beam-induced deposition
noble metal
non-noble metals
post-growth annealing
Online Access:https://doi.org/10.3762/bjnano.9.11

Internet

https://doi.org/10.3762/bjnano.9.11

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