Structural Characterizations, Optical and Electrical Properties of Zinc Oxide Thin Films Grown by Atomic Layer Deposition Method
In this paper we present the structural, optical and electrical characteristics of ZnO thin films grown for different parameters by the atomic layer deposition (ALD) method. The films were grown on glass and silicon substrates at low temperatures. We used diethyl-zinc (DEZn) and deionized water as...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | Arabic |
| Published: |
Tishreen University
2013-09-01
|
| Series: | مجلة جامعة تشرين للبحوث والدراسات العلمية، سلسلة العلوم الأساسية |
| Online Access: | http://www.journal.tishreen.edu.sy/index.php/bassnc/article/view/87 |