Effect of C2H2 flow rate on microstructure, properties, and application in micro-drilling of a-C:H films deposited by PECVD

Effect of C2H2 flow rate on microstructure, properties, and application in micro-drilling of a-C:H films deposited by PECVD

The drilling of printed circuit board (PCB) using micro-drills is an important processing method in modern industry. A protective film with good lubricating and anti-wear properties is generally applied to improve the processing problems of micro-drills during operation. In this study, the effects o...

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Detaylı Bibliyografya
Asıl Yazarlar: Beibei Ren, Yu Xia, Yanjun Chen, Yifan Su, Jia Lou, Cheng Zhang, Peng Tang, Songsheng Lin, Mingjiang Dai
Materyal Türü: Makale
Dil:English
Baskı/Yayın Bilgisi: Elsevier 2024-03-01
Seri Bilgileri:Journal of Materials Research and Technology
Konular:
A-C:H film
Plasma enhanced chemical vapor deposition
C2H2 flow rate
Micro-drilling
High hardness
Online Erişim:http://www.sciencedirect.com/science/article/pii/S2238785424002072

Internet

http://www.sciencedirect.com/science/article/pii/S2238785424002072

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