Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
Abstract In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and compressibility with a compact and small design is presented. The fluid measurement system is formed by a two-port AlScN piezoelectric micromachined ultrasonic transducer (PMUT) with an 80 μm len...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2022-07-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-022-00413-y |