Micro Energy Harvester With Dual Electrets on Sandwich Structure Optimized by Air Damping Control for Wireless Sensor Network Application
In this paper, we have designed, fabricated, and characterized a micro-scale electrostatic energy harvester based on microelectromechanical system technology. Sandwich structure with dual electrets was utilized, which can be fully packaged with optimal pressure control to reduce the energy loss from...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2018-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8359110/ |