Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity
Piezoelectric micromachined ultrasonic transducers (PMUTs) are a promising alternative to conventional bulk piezoelectric ceramic-based ultrasonic transducers. However, the transmitting sensitivity of the reported PMUTs is far from satisfactory. In this paper, we report a beam-membrane coupled PMUT...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-03-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/3/423 |