Ranking routes in semiconductor wafer fabs
Abstract We develop a method to estimate the quality of processing routes in a wafer fabrication process. Ranking such routes can be useful for identifying the “best” and “worst” routes when making adjustments to recipes. Route categorization is also useful in developing efficient scheduling algorit...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2023-08-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-023-39187-2 |