Surface Morphology and Spectroscopic Features of Homoepitaxial Diamond Films Prepared by MWPACVD at High CH<sub>4</sub> Concentrations

Single crystal diamond (SCD) is a promising material to satisfy emerging requirements of high-demand fields, such as microelectronics, beta batteries and wide-spectrum optical communication systems, due to its excellent optical characteristics, elevated breakdown voltage, high hardness and superior...

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Bibliographic Details
Main Authors: Javier Sierra Gómez, José Vieira, Mariana Amorim Fraga, Evaldo Jose Corat, Vladimir Jesus Trava-Airoldi
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/15/21/7416