Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell

Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell

A wafer-level functionality testing and characterisation system for ISFETs (ion-sensitive field-effect transistor) is realised by means of integration of a specifically designedcapillary electrochemical micro-droplet cell into a commercial wafer prober-station. Thedeveloped system allows the identif...

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Bibliographic Details
Main Authors: Michael J. Schöning, Mattea Müller-Veggian, Joachim W. Schultze, Christian Rosenkranz, Joachim P. Kloock, Kerstin Schumacher, Arshak Poghossian
Format: Article
Language:English
Published: MDPI AG 2006-04-01
Series:Sensors
Subjects:
ISFET
wafer-level testing
capillary micro-droplet cell.
Online Access:http://www.mdpi.com/1424-8220/6/4/397/

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http://www.mdpi.com/1424-8220/6/4/397/

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