Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell
A wafer-level functionality testing and characterisation system for ISFETs (ion-sensitive field-effect transistor) is realised by means of integration of a specifically designedcapillary electrochemical micro-droplet cell into a commercial wafer prober-station. Thedeveloped system allows the identif...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2006-04-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/6/4/397/ |
| _version_ | 1811185994013081600 |
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| author | Michael J. Schöning Mattea Müller-Veggian Joachim W. Schultze Christian Rosenkranz Joachim P. Kloock Kerstin Schumacher Arshak Poghossian |
| author_facet | Michael J. Schöning Mattea Müller-Veggian Joachim W. Schultze Christian Rosenkranz Joachim P. Kloock Kerstin Schumacher Arshak Poghossian |
| author_sort | Michael J. Schöning |
| collection | DOAJ |
| description | A wafer-level functionality testing and characterisation system for ISFETs (ion-sensitive field-effect transistor) is realised by means of integration of a specifically designedcapillary electrochemical micro-droplet cell into a commercial wafer prober-station. Thedeveloped system allows the identification and selection of “good†ISFETs at the earlieststage and to avoid expensive bonding, encapsulation and packaging processes for non-functioning ISFETs and thus, to decrease costs, which are wasted for bad dies. Thedeveloped system is also feasible for wafer-level characterisation of ISFETs in terms ofsensitivity, hysteresis and response time. Additionally, the system might be also utilised forwafer-level testing of further electrochemical sensors. |
| first_indexed | 2024-04-11T13:39:57Z |
| format | Article |
| id | doaj.art-981a408d5d474ead86f2665d497605da |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T13:39:57Z |
| publishDate | 2006-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-981a408d5d474ead86f2665d497605da2022-12-22T04:21:19ZengMDPI AGSensors1424-82202006-04-016439740410.3390/s6040397Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet CellMichael J. SchöningMattea Müller-VeggianJoachim W. SchultzeChristian RosenkranzJoachim P. KloockKerstin SchumacherArshak PoghossianA wafer-level functionality testing and characterisation system for ISFETs (ion-sensitive field-effect transistor) is realised by means of integration of a specifically designedcapillary electrochemical micro-droplet cell into a commercial wafer prober-station. Thedeveloped system allows the identification and selection of “good†ISFETs at the earlieststage and to avoid expensive bonding, encapsulation and packaging processes for non-functioning ISFETs and thus, to decrease costs, which are wasted for bad dies. Thedeveloped system is also feasible for wafer-level characterisation of ISFETs in terms ofsensitivity, hysteresis and response time. Additionally, the system might be also utilised forwafer-level testing of further electrochemical sensors.http://www.mdpi.com/1424-8220/6/4/397/ISFETwafer-level testingcapillary micro-droplet cell. |
| spellingShingle | Michael J. Schöning Mattea Müller-Veggian Joachim W. Schultze Christian Rosenkranz Joachim P. Kloock Kerstin Schumacher Arshak Poghossian Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell Sensors ISFET wafer-level testing capillary micro-droplet cell. |
| title | Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell |
| title_full | Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell |
| title_fullStr | Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell |
| title_full_unstemmed | Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell |
| title_short | Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell |
| title_sort | functional testing and characterisation of isfets on wafer level by means of a micro droplet cell |
| topic | ISFET wafer-level testing capillary micro-droplet cell. |
| url | http://www.mdpi.com/1424-8220/6/4/397/ |
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