Capacitive Based Micromachined Resonators for Low Level Mass Detection

Capacitive Based Micromachined Resonators for Low Level Mass Detection

Advancements in microfabrication technologies and novel materials have led to new innovations in miniaturized gas sensors that can identify miniscule changes in a complex environment. Micromachined resonators with the capability to offer high sensitivity and selectivity in array integration make mas...

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Bibliographic Details
Main Authors: Muhammad Umair Nathani, Haleh Nazemi, Calvin Love, Yameema Babu Lopez, Siddharth Swaminathan, Arezoo Emadi
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Micromachines
Subjects:
capacitive
clamped membrane
gas detection
gas sensor
gravimetric
microbridge
Online Access:https://www.mdpi.com/2072-666X/12/1/13

Internet

https://www.mdpi.com/2072-666X/12/1/13

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