Improvement of the optical properties after surface error correction of aluminium mirror surfaces

Abstract Ion beam finishing techniques of aluminium mirrors have a high potential to meet the increasing demands on applications of high-performance mirror devices for visible and ultraviolet spectral range. Reactively driven ion beam machining using oxygen and nitrogen gases enables the direct figu...

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Bibliographic Details
Main Authors: M. Ulitschka, J. Bauer, F. Frost, T. Arnold
Format: Article
Language:English
Published: EDP Sciences 2021-01-01
Series:Journal of the European Optical Society-Rapid Publications
Subjects:
Online Access:https://doi.org/10.1186/s41476-020-00143-6