Broadened Low Anomalous Dispersion in Athermal Aluminum Nitride Hybrid Waveguides
An aluminum nitride hybrid waveguide is proposed to reduce the challenges brought on by high temperature sensitivity of microresonator-based devices. The waveguide is temperature–insensitive (athermal) and has an effective thermo-optic coefficient value of ±2 × 10<...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2022-01-01
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Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9765711/ |