Broadened Low Anomalous Dispersion in Athermal Aluminum Nitride Hybrid Waveguides

An aluminum nitride hybrid waveguide is proposed to reduce the challenges brought on by high temperature sensitivity of microresonator-based devices. The waveguide is temperature&#x2013;insensitive (athermal) and has an effective thermo-optic coefficient value of &#x00B1;2 &#x00D7; 10<...

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Bibliographic Details
Main Authors: Jianbin Ma, Ruiting Wang, Guangzhen Luo, Pengfei Ma, Pengfei Wang, Yejin Zhang, Jiaoqing Pan
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9765711/