Preparation and Gas Separation of Amorphous Silicon Oxycarbide Membrane Supported on Silicon Nitride Membrane
An amorphous silicon oxycarbide membrane supported on a silicon nitride membrane substrate was prepared. A starting suspension containing polyhydromethylsiloxane (PHMS), tetramethyltetravinyl-cyclotetrasiloxane (TMTVS) and a platinum catalyst was first prepared and spin-coated on a silicon nitride m...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-03-01
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| Series: | Membranes |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2077-0375/14/3/63 |