Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”
The enhanced piezoelectric properties of aluminum scandium nitride (Al<sub>1−x</sub>Sc<sub>x</sub>N or AlScN) were discovered in 2009 by Morito Akiyama’s team [...]
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-05-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/5/1067 |