Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”
The enhanced piezoelectric properties of aluminum scandium nitride (Al<sub>1−x</sub>Sc<sub>x</sub>N or AlScN) were discovered in 2009 by Morito Akiyama’s team [...]
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-05-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/5/1067 |
| _version_ | 1797599002619805696 |
|---|---|
| author | Agnė Žukauskaitė |
| author_facet | Agnė Žukauskaitė |
| author_sort | Agnė Žukauskaitė |
| collection | DOAJ |
| description | The enhanced piezoelectric properties of aluminum scandium nitride (Al<sub>1−x</sub>Sc<sub>x</sub>N or AlScN) were discovered in 2009 by Morito Akiyama’s team [...] |
| first_indexed | 2024-03-11T03:29:21Z |
| format | Article |
| id | doaj.art-98a7f46a469a4822b3a5fe53c947359e |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-11T03:29:21Z |
| publishDate | 2023-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-98a7f46a469a4822b3a5fe53c947359e2023-11-18T02:31:17ZengMDPI AGMicromachines2072-666X2023-05-01145106710.3390/mi14051067Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”Agnė Žukauskaitė0Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, 01277 Dresden, GermanyThe enhanced piezoelectric properties of aluminum scandium nitride (Al<sub>1−x</sub>Sc<sub>x</sub>N or AlScN) were discovered in 2009 by Morito Akiyama’s team [...]https://www.mdpi.com/2072-666X/14/5/1067n/a |
| spellingShingle | Agnė Žukauskaitė Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices” Micromachines n/a |
| title | Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices” |
| title_full | Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices” |
| title_fullStr | Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices” |
| title_full_unstemmed | Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices” |
| title_short | Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices” |
| title_sort | editorial for special issue piezoelectric aluminium scandium nitride alscn thin films material development and applications in microdevices |
| topic | n/a |
| url | https://www.mdpi.com/2072-666X/14/5/1067 |
| work_keys_str_mv | AT agnezukauskaite editorialforspecialissuepiezoelectricaluminiumscandiumnitridealscnthinfilmsmaterialdevelopmentandapplicationsinmicrodevices |