Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”

Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”

The enhanced piezoelectric properties of aluminum scandium nitride (Al<sub>1−x</sub>Sc<sub>x</sub>N or AlScN) were discovered in 2009 by Morito Akiyama’s team [...]

Bibliographic Details
Main Author:	Agnė Žukauskaitė
Format:	Article
Language:	English
Published:	MDPI AG 2023-05-01
Series:	Micromachines
Subjects:	n/a
Online Access:	https://www.mdpi.com/2072-666X/14/5/1067

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