A validated modeling strategy for piezoelectric MEMS loudspeakers including viscous effects

Piezoelectric micro-electro-mechanical system (MEMS) loudspeakers are drawing more interest due to their applications in new-developing audio technologies. MEMS devices’ small dimensions necessitate including thermal and viscous effects in the surrounding air when simulating their behaviors. Thus, t...

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Bibliographic Details
Main Authors: Hassanpour Guilvaiee Hamideh, Heyes Paul, Novotny Christian, Kaltenbacher Manfred, Toth Florian
Format: Article
Language:English
Published: EDP Sciences 2023-01-01
Series:Acta Acustica
Subjects:
Online Access:https://acta-acustica.edpsciences.org/articles/aacus/full_html/2023/01/aacus220101/aacus220101.html