Development of a Flexible MEMS Sensor for Subsonic Flow

Development of a Flexible MEMS Sensor for Subsonic Flow

Detection and control of flow separation is a key to improving the efficiency of fluid machinery. In this study, we developed a flexible MEMS (microelectromechanical systems) sensor for measuring the wall shear stress and flow angle in subsonic airflow. The developed sensor is made of a flexible pol...

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Bibliographic Details
Main Authors: Koichi Murakami, Daiki Shiraishi, Shunsuke Mizumi, Yoshiko Oya, Naoto Omura, Takanori Shibata, Yoshiyasu Ichikawa, Masahiro Motosuke
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Micromachines
Subjects:
MEMS flow sensor
hot-film
flow rate
flow direction
subsonic flow
Online Access:https://www.mdpi.com/2072-666X/13/8/1299

Internet

https://www.mdpi.com/2072-666X/13/8/1299

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