Development of a Flexible MEMS Sensor for Subsonic Flow
Detection and control of flow separation is a key to improving the efficiency of fluid machinery. In this study, we developed a flexible MEMS (microelectromechanical systems) sensor for measuring the wall shear stress and flow angle in subsonic airflow. The developed sensor is made of a flexible pol...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-08-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/8/1299 |
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| author | Koichi Murakami Daiki Shiraishi Shunsuke Mizumi Yoshiko Oya Naoto Omura Takanori Shibata Yoshiyasu Ichikawa Masahiro Motosuke |
| author_facet | Koichi Murakami Daiki Shiraishi Shunsuke Mizumi Yoshiko Oya Naoto Omura Takanori Shibata Yoshiyasu Ichikawa Masahiro Motosuke |
| author_sort | Koichi Murakami |
| collection | DOAJ |
| description | Detection and control of flow separation is a key to improving the efficiency of fluid machinery. In this study, we developed a flexible MEMS (microelectromechanical systems) sensor for measuring the wall shear stress and flow angle in subsonic airflow. The developed sensor is made of a flexible polyimide film and a microheater surrounded by three temperature sensor pairs. The sensor measures the wall shear stress from the heater output and the flow angle from the temperature gradient around the heater. The geometry and design of the heater and temperature sensors were determined based on numerical simulations. To evaluate the validity of the sensor, we conducted an experiment to measure the wall shear stress and the flow angle in a wind tunnel in different velocities ranging from 30 m/s to 170 m/s, equivalent to Mach numbers from 0.1 to 0.5. The heater output was proportional to one-third power of the wall shear stress. Additionally, the bridge output correlating the temperature difference between two opposing temperature sensors showed sinusoidal variation depending on the flow angle. Consequently, we have clarified that the developed sensor can measure both the wall shear stress and flow direction in subsonic flow. |
| first_indexed | 2024-03-09T04:04:46Z |
| format | Article |
| id | doaj.art-98cd2ec1104f4b16b045764c3b268b6d |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T04:04:46Z |
| publishDate | 2022-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-98cd2ec1104f4b16b045764c3b268b6d2023-12-03T14:08:17ZengMDPI AGMicromachines2072-666X2022-08-01138129910.3390/mi13081299Development of a Flexible MEMS Sensor for Subsonic FlowKoichi Murakami0Daiki Shiraishi1Shunsuke Mizumi2Yoshiko Oya3Naoto Omura4Takanori Shibata5Yoshiyasu Ichikawa6Masahiro Motosuke7Department of Mechanical Engineering, Graduate School of Engineering, Tokyo University of Science, Tokyo 125-8585, JapanDepartment of Mechanical Engineering, Graduate School of Engineering, Tokyo University of Science, Tokyo 125-8585, JapanResearch and Innovation Center, Mitsubishi Heavy Industries, Takasago City 676-8686, JapanResearch and Innovation Center, Mitsubishi Heavy Industries, Takasago City 676-8686, JapanResearch and Innovation Center, Mitsubishi Heavy Industries, Takasago City 676-8686, JapanDepartment of Systems Innovation Engineering, Faculty of Science and Engineering, Iwate University, Morioka 020-8551, JapanDepartment of Mechanical Engineering, Faculty of Engineering, Tokyo University of Science, Tokyo 125-8585, JapanDepartment of Mechanical Engineering, Faculty of Engineering, Tokyo University of Science, Tokyo 125-8585, JapanDetection and control of flow separation is a key to improving the efficiency of fluid machinery. In this study, we developed a flexible MEMS (microelectromechanical systems) sensor for measuring the wall shear stress and flow angle in subsonic airflow. The developed sensor is made of a flexible polyimide film and a microheater surrounded by three temperature sensor pairs. The sensor measures the wall shear stress from the heater output and the flow angle from the temperature gradient around the heater. The geometry and design of the heater and temperature sensors were determined based on numerical simulations. To evaluate the validity of the sensor, we conducted an experiment to measure the wall shear stress and the flow angle in a wind tunnel in different velocities ranging from 30 m/s to 170 m/s, equivalent to Mach numbers from 0.1 to 0.5. The heater output was proportional to one-third power of the wall shear stress. Additionally, the bridge output correlating the temperature difference between two opposing temperature sensors showed sinusoidal variation depending on the flow angle. Consequently, we have clarified that the developed sensor can measure both the wall shear stress and flow direction in subsonic flow.https://www.mdpi.com/2072-666X/13/8/1299MEMS flow sensorhot-filmflow rateflow directionsubsonic flow |
| spellingShingle | Koichi Murakami Daiki Shiraishi Shunsuke Mizumi Yoshiko Oya Naoto Omura Takanori Shibata Yoshiyasu Ichikawa Masahiro Motosuke Development of a Flexible MEMS Sensor for Subsonic Flow Micromachines MEMS flow sensor hot-film flow rate flow direction subsonic flow |
| title | Development of a Flexible MEMS Sensor for Subsonic Flow |
| title_full | Development of a Flexible MEMS Sensor for Subsonic Flow |
| title_fullStr | Development of a Flexible MEMS Sensor for Subsonic Flow |
| title_full_unstemmed | Development of a Flexible MEMS Sensor for Subsonic Flow |
| title_short | Development of a Flexible MEMS Sensor for Subsonic Flow |
| title_sort | development of a flexible mems sensor for subsonic flow |
| topic | MEMS flow sensor hot-film flow rate flow direction subsonic flow |
| url | https://www.mdpi.com/2072-666X/13/8/1299 |
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