Development of metal substrate MEMS sensors for wall heat flux measurement in engines
To develop a heat flux sensor for internal combustion engines, two metal substrate thin film resistance sensors have been developed as prototypes by using MEMS (Micro-Electro-Mechanical Systems) technologies. In our previous study, a thin film heat flux sensor on a Si chip was developed for combusti...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2018-01-01
|
| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/84/858/84_17-00414/_pdf/-char/en |