Development of metal substrate MEMS sensors for wall heat flux measurement in engines
To develop a heat flux sensor for internal combustion engines, two metal substrate thin film resistance sensors have been developed as prototypes by using MEMS (Micro-Electro-Mechanical Systems) technologies. In our previous study, a thin film heat flux sensor on a Si chip was developed for combusti...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | Japanese |
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The Japan Society of Mechanical Engineers
2018-01-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/84/858/84_17-00414/_pdf/-char/en |
| _version_ | 1828099440878026752 |
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| author | Kazuhito DEJIMA Osamu NAKABEPPU Yuto NAKAMURA Tomohiro TSUCHIYA Keisuke NAGASAKA |
| author_facet | Kazuhito DEJIMA Osamu NAKABEPPU Yuto NAKAMURA Tomohiro TSUCHIYA Keisuke NAGASAKA |
| author_sort | Kazuhito DEJIMA |
| collection | DOAJ |
| description | To develop a heat flux sensor for internal combustion engines, two metal substrate thin film resistance sensors have been developed as prototypes by using MEMS (Micro-Electro-Mechanical Systems) technologies. In our previous study, a thin film heat flux sensor on a Si chip was developed for combustion fields. To apply the thin film sensor to the engine, a metal substrate sensor technology has to be developed. To begin with, a flat plate shape sensor with a SUS substrate was made in order to confirm the fabrication process and the performance of the metal substrate MEMS sensor. Heat fluxes were successfully measured in laminar premixed combustion fields, and it was confirmed that the SUS substrate flat plate shape sensor has sufficient performance in temporal resolution, measurement noise and temperature durability against requirements. Secondly, a plug shape sensor using an AC8A substrate was produced to be introduced to an engine. The heat from the sensor sidewall has to be taken into account due to the small size of the plug shape sensor, the analytical model for the heat flux calculation was extended to a two dimensional cylindrical system. Heat flux measurement tests under high load conditions with the plug shape sensor were conducted in a rapid compression and expansion machine. As a result, the sensor endured the harsh environment with the maximum pressure of 9.1 MPa and the heat flux load of 8.9 MW/m2. Furthermore, the measurement noise was estimated to 11.0 kW/m2, which was a quite low level compared with a commercially available heat flux sensor. Although the issue in the fabrication process remains, the prospects for introducing the MEMS heat flux sensor in internal combustion engine were obtained. |
| first_indexed | 2024-04-11T08:15:01Z |
| format | Article |
| id | doaj.art-9905ca3b6adc4082aee985e0abdc6a55 |
| institution | Directory Open Access Journal |
| issn | 2187-9761 |
| language | Japanese |
| last_indexed | 2024-04-11T08:15:01Z |
| publishDate | 2018-01-01 |
| publisher | The Japan Society of Mechanical Engineers |
| record_format | Article |
| series | Nihon Kikai Gakkai ronbunshu |
| spelling | doaj.art-9905ca3b6adc4082aee985e0abdc6a552022-12-22T04:35:11ZjpnThe Japan Society of Mechanical EngineersNihon Kikai Gakkai ronbunshu2187-97612018-01-018485817-0041417-0041410.1299/transjsme.17-00414transjsmeDevelopment of metal substrate MEMS sensors for wall heat flux measurement in enginesKazuhito DEJIMA0Osamu NAKABEPPU1Yuto NAKAMURA2Tomohiro TSUCHIYA3Keisuke NAGASAKA4Graduate School of Science and Technology, Meiji UniversitySchool of Science and Technology, Meiji UniversityGraduate School of Science and Technology, Meiji UniversityGraduate School of Science and Technology, Meiji UniversityGraduate School of Science and Technology, Meiji UniversityTo develop a heat flux sensor for internal combustion engines, two metal substrate thin film resistance sensors have been developed as prototypes by using MEMS (Micro-Electro-Mechanical Systems) technologies. In our previous study, a thin film heat flux sensor on a Si chip was developed for combustion fields. To apply the thin film sensor to the engine, a metal substrate sensor technology has to be developed. To begin with, a flat plate shape sensor with a SUS substrate was made in order to confirm the fabrication process and the performance of the metal substrate MEMS sensor. Heat fluxes were successfully measured in laminar premixed combustion fields, and it was confirmed that the SUS substrate flat plate shape sensor has sufficient performance in temporal resolution, measurement noise and temperature durability against requirements. Secondly, a plug shape sensor using an AC8A substrate was produced to be introduced to an engine. The heat from the sensor sidewall has to be taken into account due to the small size of the plug shape sensor, the analytical model for the heat flux calculation was extended to a two dimensional cylindrical system. Heat flux measurement tests under high load conditions with the plug shape sensor were conducted in a rapid compression and expansion machine. As a result, the sensor endured the harsh environment with the maximum pressure of 9.1 MPa and the heat flux load of 8.9 MW/m2. Furthermore, the measurement noise was estimated to 11.0 kW/m2, which was a quite low level compared with a commercially available heat flux sensor. Although the issue in the fabrication process remains, the prospects for introducing the MEMS heat flux sensor in internal combustion engine were obtained.https://www.jstage.jst.go.jp/article/transjsme/84/858/84_17-00414/_pdf/-char/enheat flux measurementmetal substrate mems sensorcombustionrcemengine |
| spellingShingle | Kazuhito DEJIMA Osamu NAKABEPPU Yuto NAKAMURA Tomohiro TSUCHIYA Keisuke NAGASAKA Development of metal substrate MEMS sensors for wall heat flux measurement in engines Nihon Kikai Gakkai ronbunshu heat flux measurement metal substrate mems sensor combustion rcem engine |
| title | Development of metal substrate MEMS sensors for wall heat flux measurement in engines |
| title_full | Development of metal substrate MEMS sensors for wall heat flux measurement in engines |
| title_fullStr | Development of metal substrate MEMS sensors for wall heat flux measurement in engines |
| title_full_unstemmed | Development of metal substrate MEMS sensors for wall heat flux measurement in engines |
| title_short | Development of metal substrate MEMS sensors for wall heat flux measurement in engines |
| title_sort | development of metal substrate mems sensors for wall heat flux measurement in engines |
| topic | heat flux measurement metal substrate mems sensor combustion rcem engine |
| url | https://www.jstage.jst.go.jp/article/transjsme/84/858/84_17-00414/_pdf/-char/en |
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