Preliminary Study on the Model of Thermal Laser Stimulation for Defect Localization in Integrated Circuits

Thermal Laser Stimulation (TLS) is an efficient technology for integrated circuit defect localization in Failure Analysis (FA) laboratories. It contains Optical Beam-Induced Resistance Change (OBIRCH), Thermally-Induced Voltage Alteration (TIVA), and Seebeck Effect Imaging (SEI). These techniques re...

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Bibliographic Details
Main Authors: Han Yang, Rui Chen, Jianwei Han, Yanan Liang, Yingqi Ma, Hao Wu
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/10/23/8576