Enhancement of laser ablation via interacting spatial double-pulse effect
A novel spatial double-pulse laser ablation scheme is investigated to enhance the processing quality and efficiency for nanosecond laser ablation of silicon substrate. During the double-pulse laser ablation, two splitted laser beams simultaneously irradiate on silicon surface at a tunable gap. The a...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institue of Optics and Electronics, Chinese Academy of Sciences
2018-11-01
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| Series: | Opto-Electronic Advances |
| Subjects: | |
| Online Access: | http://www.oejournal.org/article/doi/10.29026/oea.2018.180014 |