A variable probe pitch micro-Hall effect method

A variable probe pitch micro-Hall effect method

Hall effect metrology is important for a detailed characterization of the electronic properties of new materials for nanoscale electronics. The micro-Hall effect (MHE) method, based on micro four-point probes, enables a fast characterization of ultrathin films with minimal sample preparation. Here,...

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Bibliographic Details
Main Authors: Maria-Louise Witthøft, Frederik W. Østerberg, Janusz Bogdanowicz, Rong Lin, Henrik H. Henrichsen, Ole Hansen, Dirch H. Petersen
Format: Article
Language:English
Published: Beilstein-Institut 2018-07-01
Series:Beilstein Journal of Nanotechnology
Subjects:
four-point probes
Hall effect
metrology
mobility
variable Probe Pitch
Online Access:https://doi.org/10.3762/bjnano.9.192

Internet

https://doi.org/10.3762/bjnano.9.192

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