Numerical Solution of the Partial Differential Equation Bilaplacian Type by the Finite Element Method for the Simulation of Accelerometer-Type MEMS
In this paper, the numerical solution of the Partial Differential Equation Bilaplacian type by the finite element method is presented in order to simulate the accelerometer-type MEMS behavior. The above mentioned solution is used to emulate the behavior of the deformation of an Accelerometer-type ME...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
International Institute of Informatics and Cybernetics
2021-12-01
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| Series: | Journal of Systemics, Cybernetics and Informatics |
| Subjects: | |
| Online Access: | http://www.iiisci.org/Journal/PDV/sci/pdfs/SA934UC21.pdf
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