Numerical Solution of the Partial Differential Equation Bilaplacian Type by the Finite Element Method for the Simulation of Accelerometer-Type MEMS

Numerical Solution of the Partial Differential Equation Bilaplacian Type by the Finite Element Method for the Simulation of Accelerometer-Type MEMS

In this paper, the numerical solution of the Partial Differential Equation Bilaplacian type by the finite element method is presented in order to simulate the accelerometer-type MEMS behavior. The above mentioned solution is used to emulate the behavior of the deformation of an Accelerometer-type ME...

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Bibliographic Details
Main Authors: José David Alanís Urquieta, Blanca Bermúdez Juárez, Paulo Daniel Vazquez Mora, Armando Hernández Flores
Format: Article
Language:English
Published: International Institute of Informatics and Cybernetics 2021-12-01
Series:Journal of Systemics, Cybernetics and Informatics
Subjects:
partial differential equation
numerical solution
mems
finite element method
simulation
Online Access:http://www.iiisci.org/Journal/PDV/sci/pdfs/SA934UC21.pdf

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