Morphology and Corrosion Behavior Study of Thin TiN Films Deposited at Different Substrates by DC Magnetron Sputtering
TiN thin films have been deposited by magnetron sputtering (DC) method under pure argon (100% Ar) gas for different times at 100 oC temperature. Additionally, three substrate types have been used: Low Carbon Steel (LCS), Stainless Steel (SS304) and Silicon of (100) orientation. The composition of t...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universidade Federal de Mato Grosso do Sul
2021-03-01
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| Series: | Orbital: The Electronic Journal of Chemistry |
| Subjects: | |
| Online Access: | https://periodicos.ufms.br/index.php/orbital/article/view/15698 |