MOLECULAR DYNAMICS MODEL OF THE TECHNOLOGY OF AMORPHOUS METAL FILMS PRODUCTION BY CONDENSATION ON THE COOLED SUBSTRATE
A computer molecular dynamics program has been developed which makes it possible to imitate processes of thin film and epitaxial technologies. The program was approbated on the technology of amorphous metal films production by means of condensation on cooled substrate. It has been found that even at...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | Russian |
| Published: |
Tver State University
2015-11-01
|
| Series: | Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов |
| Subjects: | |
| Online Access: | http://physchemaspects.ru/archives/2015/%D0%A4%D0%A5-2015%20%D0%A1%D0%B0%D0%BC%D1%81%D0%BE%D0%BD%D0%BE%D0%B2%20%D0%92%D0%9C%201.pdf |