Error Analysis for Repeatability Enhancement of a Dual-Rotation Mueller Matrix Ellipsometer
Since the Mueller matrix ellipsometer has been used as a highly accurate tool for thin film measurement, the error analysis and repeatability enhancement of such a tool are of great importance. The existence of the Poisson–Gaussian mixed noise and the random bias of the trigger signal in the optical...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2022-01-01
|
| Series: | Frontiers in Physics |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fphy.2021.820552/full |