On-Chip Tests for the Characterization of the Mechanical Strength of Polysilicon

On-Chip Tests for the Characterization of the Mechanical Strength of Polysilicon

Microelectromechanical systems (MEMS) are nowadays widespread in the sensor market, with several different applications. New production techniques and ever smaller device geometries require a continuous investigation of potential failure mechanisms in such devices. This work presents an experimental...

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Bibliographic Details
Main Authors: Tiago Vicentini Ferreira do Valle, Aldo Ghisi, Stefano Mariani, Gabriele Gattere, Francesco Rizzini, Luca Guerinoni, Luca Falorni
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Engineering Proceedings
Subjects:
polysilicon tensile strength
polysilicon thin films
on-chip mechanical testing
Online Access:https://www.mdpi.com/2673-4591/27/1/10

Internet

https://www.mdpi.com/2673-4591/27/1/10

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