On-Chip Tests for the Characterization of the Mechanical Strength of Polysilicon
Microelectromechanical systems (MEMS) are nowadays widespread in the sensor market, with several different applications. New production techniques and ever smaller device geometries require a continuous investigation of potential failure mechanisms in such devices. This work presents an experimental...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-11-01
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| Series: | Engineering Proceedings |
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| Online Access: | https://www.mdpi.com/2673-4591/27/1/10 |
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| author | Tiago Vicentini Ferreira do Valle Aldo Ghisi Stefano Mariani Gabriele Gattere Francesco Rizzini Luca Guerinoni Luca Falorni |
| author_facet | Tiago Vicentini Ferreira do Valle Aldo Ghisi Stefano Mariani Gabriele Gattere Francesco Rizzini Luca Guerinoni Luca Falorni |
| author_sort | Tiago Vicentini Ferreira do Valle |
| collection | DOAJ |
| description | Microelectromechanical systems (MEMS) are nowadays widespread in the sensor market, with several different applications. New production techniques and ever smaller device geometries require a continuous investigation of potential failure mechanisms in such devices. This work presents an experimental on-chip setup to assess the geometry- and material-dependent strength of stoppers adopted to limit the deformation of movable parts, using an electrostatically actuated device. A series of comb-finger and parallel plate capacitors are used to provide a rather large stroke to a shuttle, connected to the anchors through flexible springs. Upon application of a varying voltage, failure of stoppers of variable size is observed and confirmed by post-mortem <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi mathvariant="sans-serif">Δ</mi><mi>C</mi><mo>–</mo><mi>V</mi></mrow></semantics></math></inline-formula> curves. The results of the experimental campaign are collected to infer the stochastic property of the strength of polycrystalline, columnar silicon films. |
| first_indexed | 2024-03-11T06:36:05Z |
| format | Article |
| id | doaj.art-9a13ad4767ba4c0d860b09eb100179bc |
| institution | Directory Open Access Journal |
| issn | 2673-4591 |
| language | English |
| last_indexed | 2024-03-11T06:36:05Z |
| publishDate | 2022-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Engineering Proceedings |
| spelling | doaj.art-9a13ad4767ba4c0d860b09eb100179bc2023-11-17T10:54:28ZengMDPI AGEngineering Proceedings2673-45912022-11-012711010.3390/ecsa-9-13363On-Chip Tests for the Characterization of the Mechanical Strength of PolysiliconTiago Vicentini Ferreira do Valle0Aldo Ghisi1Stefano Mariani2Gabriele Gattere3Francesco Rizzini4Luca Guerinoni5Luca Falorni6Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, ItalyDepartment of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, ItalyDepartment of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, ItalyAMS Group—R&D, STMicroelectronics, 20010 Cornaredo, ItalyAMS Group—R&D, STMicroelectronics, 20010 Cornaredo, ItalyAMS Group—R&D, STMicroelectronics, 20010 Cornaredo, ItalyAMS Group—R&D, STMicroelectronics, 20010 Cornaredo, ItalyMicroelectromechanical systems (MEMS) are nowadays widespread in the sensor market, with several different applications. New production techniques and ever smaller device geometries require a continuous investigation of potential failure mechanisms in such devices. This work presents an experimental on-chip setup to assess the geometry- and material-dependent strength of stoppers adopted to limit the deformation of movable parts, using an electrostatically actuated device. A series of comb-finger and parallel plate capacitors are used to provide a rather large stroke to a shuttle, connected to the anchors through flexible springs. Upon application of a varying voltage, failure of stoppers of variable size is observed and confirmed by post-mortem <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi mathvariant="sans-serif">Δ</mi><mi>C</mi><mo>–</mo><mi>V</mi></mrow></semantics></math></inline-formula> curves. The results of the experimental campaign are collected to infer the stochastic property of the strength of polycrystalline, columnar silicon films.https://www.mdpi.com/2673-4591/27/1/10polysilicon tensile strengthpolysilicon thin filmson-chip mechanical testing |
| spellingShingle | Tiago Vicentini Ferreira do Valle Aldo Ghisi Stefano Mariani Gabriele Gattere Francesco Rizzini Luca Guerinoni Luca Falorni On-Chip Tests for the Characterization of the Mechanical Strength of Polysilicon Engineering Proceedings polysilicon tensile strength polysilicon thin films on-chip mechanical testing |
| title | On-Chip Tests for the Characterization of the Mechanical Strength of Polysilicon |
| title_full | On-Chip Tests for the Characterization of the Mechanical Strength of Polysilicon |
| title_fullStr | On-Chip Tests for the Characterization of the Mechanical Strength of Polysilicon |
| title_full_unstemmed | On-Chip Tests for the Characterization of the Mechanical Strength of Polysilicon |
| title_short | On-Chip Tests for the Characterization of the Mechanical Strength of Polysilicon |
| title_sort | on chip tests for the characterization of the mechanical strength of polysilicon |
| topic | polysilicon tensile strength polysilicon thin films on-chip mechanical testing |
| url | https://www.mdpi.com/2673-4591/27/1/10 |
| work_keys_str_mv | AT tiagovicentiniferreiradovalle onchiptestsforthecharacterizationofthemechanicalstrengthofpolysilicon AT aldoghisi onchiptestsforthecharacterizationofthemechanicalstrengthofpolysilicon AT stefanomariani onchiptestsforthecharacterizationofthemechanicalstrengthofpolysilicon AT gabrielegattere onchiptestsforthecharacterizationofthemechanicalstrengthofpolysilicon AT francescorizzini onchiptestsforthecharacterizationofthemechanicalstrengthofpolysilicon AT lucaguerinoni onchiptestsforthecharacterizationofthemechanicalstrengthofpolysilicon AT lucafalorni onchiptestsforthecharacterizationofthemechanicalstrengthofpolysilicon |