MAGNETRON SPUTTERING WITH HOT SOLID TARGET: THERMAL PROCESSES AND EROSION

MAGNETRON SPUTTERING WITH HOT SOLID TARGET: THERMAL PROCESSES AND EROSION

This work focuses on erosion and thermal processes taking place on the surface of the titanium target in magnetron sputtering. The study was carried out using magnetron sputtering systems (MSS) with different thermal insulation target types from the magnetron body. It was found that the presence of...

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Bibliographic Details
Main Authors: Alena Olegovna Borduleva, Galina Alekseevna Bleykher, Dmitrii Vladimirovich Sidelev, Valeriy Pavlovich Krivobokov
Format: Article
Language:English
Published: CTU Central Library 2016-12-01
Series:Acta Polytechnica
Subjects:
magnetron sputtering
hot target
evaporation
high rate deposition.
Online Access:https://ojs.cvut.cz/ojs/index.php/ap/article/view/3766

Internet

https://ojs.cvut.cz/ojs/index.php/ap/article/view/3766

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