Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements
Optical accelerometers are popular in some applications because of their better immunity to electromagnetic interference, and they are often more sensitive than other accelerometer types. Optical fibers were employed in most previous generations, making micro-fabrication problematic. The optical acc...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-02-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/3/343 |