Determination of electron inelastic mean free path and stopping power of hafnium dioxide

We present inelastic mean free path (IMFP) and stopping power data of the hafnium dioxide applying the relativistic dielectric response theory. The energy loss function (ELF) derived from reflection electron energy loss spectroscopy spectrum with the reverse Monte Carlo method was used for the first...

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Bibliographic Details
Main Authors: J.M. Gong, K. Tőkési, X. Liu, B. Da, H. Yoshikawa, S. Tanuma, Z.J. Ding
Format: Article
Language:English
Published: Elsevier 2023-08-01
Series:Results in Physics
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2211379723004023