Pre-Deformation-Assisted Cryogenic Micromachining for Fabrication of Three-dimensional Unique Micro Channels
Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In thi...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2010-08-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_936/_pdf/-char/en |