Pre-Deformation-Assisted Cryogenic Micromachining for Fabrication of Three-dimensional Unique Micro Channels
Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In thi...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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The Japan Society of Mechanical Engineers
2010-08-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_936/_pdf/-char/en |
| _version_ | 1818107883159552000 |
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| author | Koji MISHIMA Yasuhiro KAKINUMA Tojiro AOYAMA |
| author_facet | Koji MISHIMA Yasuhiro KAKINUMA Tojiro AOYAMA |
| author_sort | Koji MISHIMA |
| collection | DOAJ |
| description | Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In this paper, the cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shapes of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS. |
| first_indexed | 2024-12-11T02:06:32Z |
| format | Article |
| id | doaj.art-9aef03bb02a94f6b830b3d3a50e5a230 |
| institution | Directory Open Access Journal |
| issn | 1881-3054 |
| language | English |
| last_indexed | 2024-12-11T02:06:32Z |
| publishDate | 2010-08-01 |
| publisher | The Japan Society of Mechanical Engineers |
| record_format | Article |
| series | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| spelling | doaj.art-9aef03bb02a94f6b830b3d3a50e5a2302022-12-22T01:24:22ZengThe Japan Society of Mechanical EngineersJournal of Advanced Mechanical Design, Systems, and Manufacturing1881-30542010-08-014593694710.1299/jamdsm.4.936jamdsmPre-Deformation-Assisted Cryogenic Micromachining for Fabrication of Three-dimensional Unique Micro ChannelsKoji MISHIMA0Yasuhiro KAKINUMA1Tojiro AOYAMA2School of Integrated Design Engineering, Keio UniversityDepartment of System Design Engineering, Keio UniversityDepartment of System Design Engineering, Keio UniversityPolydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In this paper, the cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shapes of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS.https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_936/_pdf/-char/enpdmsmicrofluidic chipµ-tascryogenic micromachining3d shaped channel |
| spellingShingle | Koji MISHIMA Yasuhiro KAKINUMA Tojiro AOYAMA Pre-Deformation-Assisted Cryogenic Micromachining for Fabrication of Three-dimensional Unique Micro Channels Journal of Advanced Mechanical Design, Systems, and Manufacturing pdms microfluidic chip µ-tas cryogenic micromachining 3d shaped channel |
| title | Pre-Deformation-Assisted Cryogenic Micromachining for Fabrication of Three-dimensional Unique Micro Channels |
| title_full | Pre-Deformation-Assisted Cryogenic Micromachining for Fabrication of Three-dimensional Unique Micro Channels |
| title_fullStr | Pre-Deformation-Assisted Cryogenic Micromachining for Fabrication of Three-dimensional Unique Micro Channels |
| title_full_unstemmed | Pre-Deformation-Assisted Cryogenic Micromachining for Fabrication of Three-dimensional Unique Micro Channels |
| title_short | Pre-Deformation-Assisted Cryogenic Micromachining for Fabrication of Three-dimensional Unique Micro Channels |
| title_sort | pre deformation assisted cryogenic micromachining for fabrication of three dimensional unique micro channels |
| topic | pdms microfluidic chip µ-tas cryogenic micromachining 3d shaped channel |
| url | https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_936/_pdf/-char/en |
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