A Method for Broadband Polyimide Permittivity Measurement of Silicon Interposer Applied for High Speed Digital Microsystem

A Method for Broadband Polyimide Permittivity Measurement of Silicon Interposer Applied for High Speed Digital Microsystem

High-speed digital microsystems has emerged as one of the most important solutions for improving system performance, bandwidth, and power consumption. Based on mature micro-system processing technology, a material extraction approach for silicon interposer applied for high-speed digital microsystems...

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Bibliographic Details
Main Authors: Zhuoyue Zheng, Yongkun Wang, Lei Han, Daowei Wu, Defeng Mo, Wenchao Tian
Format: Article
Language:English
Published: MDPI AG 2022-07-01
Series:Micromachines
Subjects:
micro-system
interposer
polyimide
dielectric properties
microstrip line
iterative inversion method
Online Access:https://www.mdpi.com/2072-666X/13/7/1138

Internet

https://www.mdpi.com/2072-666X/13/7/1138

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