High Spatial Resolution Ion Imaging by Focused Electron-Beam Excitation with Nanometric Thin Sensor Substrate

High Spatial Resolution Ion Imaging by Focused Electron-Beam Excitation with Nanometric Thin Sensor Substrate

We developed a high spatially-resolved ion-imaging system using focused electron beam excitation. In this system, we designed a nanometric thin sensor substrate to improve spatial resolution. The principle of pH measurement is similar to that of a light-addressable potentiometric sensor (LAPS), howe...

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Bibliographic Details
Main Authors: Kiyohisa Nii, Wataru Inami, Yoshimasa Kawata
Format: Article
Language:English
Published: MDPI AG 2022-02-01
Series:Sensors
Subjects:
light-addressable potentiometric sensor
high spatial resolution
electron-beam-induced current
thin sensor substrate
chemical imaging system
electron-beam addressable potentiometric sensor
Online Access:https://www.mdpi.com/1424-8220/22/3/1112

Internet

https://www.mdpi.com/1424-8220/22/3/1112

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