Structure and Chemical Composition of Ion-Synthesized Gallium Oxide Nanocrystals in Dielectric Matrices

Structure and Chemical Composition of Ion-Synthesized Gallium Oxide Nanocrystals in Dielectric Matrices

The ion-beam synthesis of Ga<sub>2</sub>O<sub>3</sub> nanocrystals in dielectric matrices on silicon is a novel and promising way for creating nanomaterials based on gallium oxide. This research studies the regularities of changes, depending on the synthesis regimes used, in...

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Bibliographic Details
Main Authors: Dmitry S. Korolev, Ruslan N. Kriukov, Kristina S. Matyunina, Alena A. Nikolskaya, Alexey I. Belov, Alexey N. Mikhaylov, Artem A. Sushkov, Dmitry A. Pavlov, David I. Tetelbaum
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Nanomaterials
Subjects:
gallium oxide
nanocrystals
ion-beam synthesis
ion implantation
thermal annealing
X-ray photoelectron spectroscopy
Online Access:https://www.mdpi.com/2079-4991/13/10/1658

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https://www.mdpi.com/2079-4991/13/10/1658

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