Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties

Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties

The absorption of light in the near-infrared region of the electromagnetic spectrum by Au-hyperdoped Si has been observed. While silicon photodetectors in this range are currently being produced, their efficiency is low. Here, using the nanosecond and picosecond laser hyperdoping of thin amorphous S...

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Bibliographic Details
Main Authors: Michael Kovalev, Alena Nastulyavichus, Ivan Podlesnykh, Nikita Stsepuro, Victoria Pryakhina, Evgeny Greshnyakov, Alexey Serdobintsev, Iliya Gritsenko, Roman Khmelnitskii, Sergey Kudryashov
Format: Article
Language:English
Published: MDPI AG 2023-06-01
Series:Materials
Subjects:
amorphous Si film
laser hyperdoping
gold impurity
energy-dispersive X-ray microspectroscopy
X-ray photoelectron microspectroscopy
Raman microspectroscopy
Online Access:https://www.mdpi.com/1996-1944/16/12/4439

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https://www.mdpi.com/1996-1944/16/12/4439

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