Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties

The absorption of light in the near-infrared region of the electromagnetic spectrum by Au-hyperdoped Si has been observed. While silicon photodetectors in this range are currently being produced, their efficiency is low. Here, using the nanosecond and picosecond laser hyperdoping of thin amorphous S...

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Main Authors: Michael Kovalev, Alena Nastulyavichus, Ivan Podlesnykh, Nikita Stsepuro, Victoria Pryakhina, Evgeny Greshnyakov, Alexey Serdobintsev, Iliya Gritsenko, Roman Khmelnitskii, Sergey Kudryashov
Format: Article
Language:English
Published: MDPI AG 2023-06-01
Series:Materials
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Online Access:https://www.mdpi.com/1996-1944/16/12/4439
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author Michael Kovalev
Alena Nastulyavichus
Ivan Podlesnykh
Nikita Stsepuro
Victoria Pryakhina
Evgeny Greshnyakov
Alexey Serdobintsev
Iliya Gritsenko
Roman Khmelnitskii
Sergey Kudryashov
author_facet Michael Kovalev
Alena Nastulyavichus
Ivan Podlesnykh
Nikita Stsepuro
Victoria Pryakhina
Evgeny Greshnyakov
Alexey Serdobintsev
Iliya Gritsenko
Roman Khmelnitskii
Sergey Kudryashov
author_sort Michael Kovalev
collection DOAJ
description The absorption of light in the near-infrared region of the electromagnetic spectrum by Au-hyperdoped Si has been observed. While silicon photodetectors in this range are currently being produced, their efficiency is low. Here, using the nanosecond and picosecond laser hyperdoping of thin amorphous Si films, their compositional (energy-dispersion X-ray spectroscopy), chemical (X-ray photoelectron spectroscopy), structural (Raman spectroscopy) and IR spectroscopic characterization, we comparatively demonstrated a few promising regimes of laser-based silicon hyperdoping with gold. Our results indicate that the optimal efficiency of impurity-hyperdoped Si materials has yet to be achieved, and we discuss these opportunities in light of our results.
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spelling doaj.art-9bac576cb7374762a51c2848b47ac4922023-11-18T11:26:18ZengMDPI AGMaterials1996-19442023-06-011612443910.3390/ma16124439Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material PropertiesMichael Kovalev0Alena Nastulyavichus1Ivan Podlesnykh2Nikita Stsepuro3Victoria Pryakhina4Evgeny Greshnyakov5Alexey Serdobintsev6Iliya Gritsenko7Roman Khmelnitskii8Sergey Kudryashov9Lebedev Physical Institute, 119991 Moscow, RussiaLebedev Physical Institute, 119991 Moscow, RussiaLebedev Physical Institute, 119991 Moscow, RussiaLebedev Physical Institute, 119991 Moscow, RussiaSchool of Natural Sciences and Mathematics, Ural Federal University, 620000 Ekaterinburg, RussiaSchool of Natural Sciences and Mathematics, Ural Federal University, 620000 Ekaterinburg, RussiaInstitute of Physics, Saratov State University, 410012 Saratov, RussiaLebedev Physical Institute, 119991 Moscow, RussiaLebedev Physical Institute, 119991 Moscow, RussiaLebedev Physical Institute, 119991 Moscow, RussiaThe absorption of light in the near-infrared region of the electromagnetic spectrum by Au-hyperdoped Si has been observed. While silicon photodetectors in this range are currently being produced, their efficiency is low. Here, using the nanosecond and picosecond laser hyperdoping of thin amorphous Si films, their compositional (energy-dispersion X-ray spectroscopy), chemical (X-ray photoelectron spectroscopy), structural (Raman spectroscopy) and IR spectroscopic characterization, we comparatively demonstrated a few promising regimes of laser-based silicon hyperdoping with gold. Our results indicate that the optimal efficiency of impurity-hyperdoped Si materials has yet to be achieved, and we discuss these opportunities in light of our results.https://www.mdpi.com/1996-1944/16/12/4439amorphous Si filmlaser hyperdopinggold impurityenergy-dispersive X-ray microspectroscopyX-ray photoelectron microspectroscopyRaman microspectroscopy
spellingShingle Michael Kovalev
Alena Nastulyavichus
Ivan Podlesnykh
Nikita Stsepuro
Victoria Pryakhina
Evgeny Greshnyakov
Alexey Serdobintsev
Iliya Gritsenko
Roman Khmelnitskii
Sergey Kudryashov
Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties
Materials
amorphous Si film
laser hyperdoping
gold impurity
energy-dispersive X-ray microspectroscopy
X-ray photoelectron microspectroscopy
Raman microspectroscopy
title Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties
title_full Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties
title_fullStr Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties
title_full_unstemmed Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties
title_short Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties
title_sort au hyperdoped si nanolayer laser processing techniques and corresponding material properties
topic amorphous Si film
laser hyperdoping
gold impurity
energy-dispersive X-ray microspectroscopy
X-ray photoelectron microspectroscopy
Raman microspectroscopy
url https://www.mdpi.com/1996-1944/16/12/4439
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