The Effect of Heat Treatment on Phase Formation of Ti-Al-C thin films
A variety of different chemical compositions Titanium-Aluminum-Carbon thin films were achieved by combinatorial magnetron sputtering. The as-deposited ternary diagram can be divided into two regions. The first region consists of titanium carbide structure with substitutional Aluminum atoms at the Ca...
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| Format: | Article |
| Language: | English |
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Unviversity of Technology- Iraq
2012-11-01
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| Series: | Engineering and Technology Journal |
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| Online Access: | https://etj.uotechnology.edu.iq/article_66175_5b8ebfe2ac9ef4fe47a569dac0c9bdc3.pdf |