Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates

Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates

Zone plates are diffractive optics commonly used in X-ray microscopes. Here, we present a wet-chemical approach for fabricating high aspect ratio Pd/Si zone plate optics aimed at the hard X-ray regime. A Si zone plate mold is fabricated via metal-assisted chemical etching (MACE) and further metalize...

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Bibliographic Details
Main Authors: Rabia Akan, Thomas Frisk, Fabian Lundberg, Hanna Ohlin, Ulf Johansson, Kenan Li, Anne Sakdinawat, Ulrich Vogt
Format: Article
Language:English
Published: MDPI AG 2020-03-01
Series:Micromachines
Subjects:
x-ray diffractive optics
zone plate
high aspect ratio nanostructures
metal-assisted chemical etching
electroless deposition
Online Access:https://www.mdpi.com/2072-666X/11/3/301

Internet

https://www.mdpi.com/2072-666X/11/3/301

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