Comparison Between Different Ways in Making Silicon Dioxide Layer on Silicon Wafers
The most important raw material for power device is epitaxial wafers, which is made from heavily doped polishing silicon wafers. In order to prevent dopant doped into silicon while pulling ingots spread into the epitaxial atmosphere and finally into the Epitaxial layer, while polishing wafers are pr...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2017-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20178801009 |