Effect of Noncircular Channel on Distribution of Threshold Voltage in 3D NAND Flash Memory
The instability in threshold voltage (<i>V<sub>TH</sub></i>) and charge distributions in noncircular cells of three-dimensional (3D) NAND flash memory are investigated. Using TCAD simulation, we aim to identify the main factors influencing the <i>V<sub>TH</sub&...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-10-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/14/11/2007 |