Effect of Noncircular Channel on Distribution of Threshold Voltage in 3D NAND Flash Memory

The instability in threshold voltage (<i>V<sub>TH</sub></i>) and charge distributions in noncircular cells of three-dimensional (3D) NAND flash memory are investigated. Using TCAD simulation, we aim to identify the main factors influencing the <i>V<sub>TH</sub&...

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Bibliographic Details
Main Authors: Donghyun Go, Gilsang Yoon, Jounghun Park, Donghwi Kim, Jiwon Kim, Jungsik Kim, Jeong-Soo Lee
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/11/2007