Top down nano technologies in surface modification of materials

Bibliographic Details
Main Authors:	Radjenović Branislav, Radmilović-Radjenović Marija
Format:	Article
Language:	English
Published:	De Gruyter 2011-04-01
Series:	Open Physics
Subjects:	nanotechnology surface modification etching roughness low k dielectrics
Online Access:	https://doi.org/10.2478/s11534-010-0096-7

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